Work

Residual Stresses Extraction from Initial Deformation of Multi-Layered Micro-Cantilever

Year: 2025

Type: conference-paper

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/eurosime65125.2025.11006619

Authors: B.H. Nguyen, M. Zunic, P. Gijsenbergh, G.B. Torri, V. Rochus

Institution: IMEC

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: HORIZON EUROPE Marie Sklodowska-Curie Actions

Award: G8037226983

OpenAlex ID: W4410639582

FWCI:

Cites: 14

Cited by:

Related to: 10