Work

Design of Single-Port Surface Acoustic Wave (SAW) Resonator on GaN Wafer as Stress Tester System for Micro and Nano Structures

Year: 2025

Type: conference-paper

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/eurosime65125.2025.11006632

Authors: Arash Mohammadi, George Boldeiu, Dan Vasilache, Afshin Ziaei, Bernhard Wunderle

Institutions: Chemnitz University of Technology, National Institute for Research and Development in Microtechnologies, Thales (France)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: European Commission

Award: HETEROGENEOUS MATERIAL AND TECHNOLOGICAL PLATFORM FOR A NEW DOMAIN OF POWER NANOELECTRONICS

OpenAlex ID: W4410639698

FWCI:

Cites: 15

Cited by:

Related to: 10