Year: 2025
Type: article
Abstract: To address the challenges of small aperture size, limited scanning angles, and high fabrication costs in existing scanning micromirrors, this paper proposes a large-aperture biaxial electromagnetically driven scanning micromirror. The scanning micromirror utilizes a stainless-steel mirror structure and an actuation structure composed of arc-shaped permanent magnets (NdFeB 52), iron cores, and copper coils. By optimizing the magnet layout and coil design, it achieves large optical scanning angles in biaxial non-resonant scanning mode. Experimental results demonstrate that the optical scanning angles reach 61.4° (x-axis) under a DC driving current of ±18.1 mA and 61.1° (y-axis) under a DC driving current of ±25.2 mA with an effective mirror aperture of 9.54 mm × 10 mm. The resonant frequencies are 89 Hz (x-axis) and 63 Hz (y-axis). Experimental results verify the feasibility of biaxial independent control in non-resonant scanning mode. The design is fabricated using a low-cost computer numerical control (CNC) milling process and exhibits application potential in fields such as LiDAR, projection display, and optical communication, providing a novel approach for performance optimization of large-aperture scanning micromirrors.
Source: Micromachines
DOI: 10.3390/mi16060610
Authors: Tong Wang, Yu Jian, Chen Liu, Manpeng Chang, Xin Wang, Weimin Wang
Institution: Chongqing University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,534
Awards: G1183184635, G1828594109, G2796437284
OpenAlex ID: W4410694986