Year: 2025
Type: article
Abstract: A supercritical carbon dioxide fluid is a compressive high-pressure medium which has a solvent capability, low diffusivity, zero surface tension, and non-toxicity. It enables to deliver chemical reagent for metal thin film deposition deep into complex features so that a conformal film deposition and filling metal into high-aspect holes. The uniqueness of the supercritical carbon dioxide is a key to realize an environmentally-friendly deposition process for future electronic devices.
Author: Eiichi Kondoh
Institution: University of Yamanashi
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W4410712604