Work

High-Sensitivity 4H-Silicon Carbide MEMS Pressure Sensors for Extreme Temperature Ranges of −75 °C to 600 °C

Year: 2025

Type: article

Source: IEEE Transactions on Instrumentation and Measurement

DOI: 10.1109/tim.2025.3573350

Authors: Lukang Wang, Yu Yang, Yabing Wang, Jinglan Huo, Nuo Wan, You Zhao, Yi Lyu, Yulong Zhao, Ming Liu

Institutions: First Affiliated Hospital of Xi'an Jiaotong University, Xi'an Jiaotong University, Xidian University, China Aerospace Science and Technology Corporation

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, National Key Research and Development Program of China

Awards: G2283526297, G2395601477, G6019013409, G6466691262

OpenAlex ID: W4410738644

FWCI: 0.924

Cites: 37

Cited by: 4

Related to: 10