Polishing of Optotechnical Parts Made of Semiconductor Materials
Year: 2025
Type: article
Source: Journal of Superhard Materials
Authors: Yu. D. Filatov, A. Y. Boyarintsev, O. V. Kolesnikov, S. M. Galkin, V. O. Novgorodtsev, Ya. I. Polupan, O. I. Pylypenko, V. I. Sidorko, S. V. Kovalev
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410747480
