Work

A single-axis and three-electrode MEMS accelerometer with linear output and zero-stiffness

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/addd2c

Authors: Yiming Jin, Zhipeng Ma, Mingkang Li, Tao Zhou, Leinuo Dong, Zhonghe Jin

Institution: Zhejiang University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G2813068394

OpenAlex ID: W4410763086

FWCI: 0.676

Cites: 30

Cited by: 3

Related to: 10