CMOS-based three-degree-of-freedom grating autocollimator with large range capability
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3065953
Authors: Yupeng Wu, Linbin Luo, Xinghui Li
Institution: Tsinghua University
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410766214