Work

Efficient white light interferometry for wafer‑scale high aspect ratio structures

Year: 2025

Type: article

Source: Measurement

DOI: 10.1016/j.measurement.2025.117988

Authors: Weihao Zhang, Weihao Zhang, Hangying Zhang, Boyu Wang, Kai Meng, Peihuang Lou

Institutions: Ministry of Industry and Information Technology, Nanjing University of Aeronautics and Astronautics

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Nanjing University of Aeronautics and Astronautics, Jiangsu Provincial Key Research and Development Program

Awards: G47376943, G6352397646, G6852642784, G6928763395

OpenAlex ID: W4410769033

FWCI: 2.509

Cites: 49

Cited by: 7

Related to: 10