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CD-SEM Anomaly Detection Through Machine Learning and Generative AI

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010721

Authors: Susan Sun, Xiaoyan Zhuo, Phong Nguyen, Todd Smith, Jinhua Ding, Troy Stansell, Amit Srivastava, Yousef Hanif

Institutions: Micron (United States), Micron (Singapore)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770262

FWCI:

Cites: 4

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Related to: 10