In-line Raman spectroscopy for semiconductors strain engineering and control : Topic/Category AM: Advanced Metrology
Year: 2025
Type: conference-paper
Authors: Zsolt Szekrényes, Van-Hoan Le, Pierre Bellanger, Leila Badeeb, Bálint Éles, Anikó Ildikó Faragó, Emmanuel Nolot, David Barge, Manon Gallard, Jean-Michel Hartmann, Pauline Hauchecorne, Virginie Loup, Julian Sturm, Amal Sediri, Róbert Bolla, Réka Petrovszki, Balázs Gombkötő, Bálint Somogyi, György Nádudvari, Anita Pongrácz, Maximilien Dallery, Nicolas Laurent
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410770282