Work

Effect of Deposition Conditions on Polysilicon PNP Emitter Grain and Electrical Performance

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010376

Authors: Meenakshi Lakshminarayanan, Adukkadukkam Dineshan, Hiew Hock Hing

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770536

FWCI:

Cites: 7

Cited by:

Related to: 10