Work

A Novel Multi-Variate Anomaly Detection Method For Chemical Vapor Deposition

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010318

Authors: Yong Khoo, Kimmy Ang, Zeen Vee Ooi

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770542

FWCI: 2.418

Cites: 10

Cited by: 1

Related to: 10