Work

Interaction Study of DIW on Fluoride-Based Solvent Chemical Behaviour

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010276

Authors: Tay Ching Leon, Sutanto Leonardo, Wong Tung Sheng, Lee Chin San, Kwok Lang Yi, Lim Wee Sin

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

SDGs: Responsible consumption and production, Clean water and sanitation

Open Access status: closed

OpenAlex ID: W4410770819

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