Work

Recurring Hotspot Detection in Lithography

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010566

Authors: Marco Halomoan, Kok Choon Ng, Juliana Puey, Janice Soon, Yulia Wunyuti

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770831

FWCI: 2.526

Cites: 8

Cited by: 1

Related to: 10