Work

WCVD Chamber Parts Material Selection To Prolong Wetclean Counter

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010281

Authors: Anthony Chua, Amon Tan, Koh Chuah

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Material Selection and Properties

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770860

FWCI:

Cites: 1

Cited by:

Related to: 10