Work

Reduction of Energy Consumption through Fab Environment Control

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010393

Authors: Raymond Van Roijen, Albert Chewning, Mark Lucksinger, Janice Paduano, Steve Schneider, Noah Osinski, Amanda Lazkani, Lori Kermel, Matt Fields, Qifang Qiao, Tom Timberlake, Oh-Jung Kwon, Amelia Rettmann

Language: English

Topic: Energy Efficiency and Management

Subfield: Renewable Energy, Sustainability and the Environment

Field: Energy

Domain: Physical Sciences

SDGs: Affordable and clean energy, Climate action

Open Access status: closed

OpenAlex ID: W4410770966

FWCI: 3.228

Cites: 5

Cited by: 1

Related to: 10