Work

Optimizing PMOS performance: Enhancing PLDD Implantation by switching from Boron to BF2

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010621

Authors: Adukkadukkam Dineshan, Cheam Kaei Ji Nita, Mohd Nurul Islam, San Ko Ko Win, Shau Chiet Ooi

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770974

FWCI:

Cites: 7

Cited by:

Related to: 10