Work

Study of Pre-Amorphization Implant Species Impact on PNP Performance

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010373

Authors: Mathew Aneesh, Adukkadukkam Dineshan, Lee King Suen

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410770988

FWCI:

Cites: 4

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Related to: 10