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Enhancing Particle Performance in Plasma-Resist-Stripping Machines through Pressure Relief Valve Assembly Relocation

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010236

Authors: Rendy Wiyogo Gozali, Michael Tan, Thiruchelvam Rajkumar, Cherk Kok Foo

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Hydraulic and Pneumatic Systems

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410771027

FWCI:

Cites: 4

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Related to: 10