Work

Investigation of the Radially Spreading Micro-Bubble Defect due to Contamination from SEM

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010274

Authors: Jaein Jeong, Eun A Ko, Youngjeong Kim

Institution: Samsung Electronics (South Korea)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410771591

FWCI: 2.3

Cites: 10

Cited by: 1

Related to: 10