Work

Purion vs Paradigm Process Matching: Copy Exact Process or Copy Exact Output? : AEPM: Advanced Equipment Processes and Materials

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010344

Authors: Anya Isaacs, Bobby Isaacs, Thanas Budri, Bill Wofford, Greg Neer, Ryan Smith

Institution: Texas Instruments (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410771972

FWCI:

Cites: 3

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Related to: 10