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DNN-based Predictive Digital Twin for FHE Manufacturing

Year: 2025

Type: conference-paper

Source: Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

DOI: 10.1109/asmc64512.2025.11010619

Authors: Haiyang Yun, Hao-Chun Liao, Jacky Borenstein, Benyamin Davaji, Peter C. Doerschuk, Amit Lal

Institutions: Northeastern University, Cornell University

Language: English

Topic: Nanomaterials and Printing Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4410779794

FWCI: 2.3

Cites: 4

Cited by: 1

Related to: 10