Work

Optimized optoelectronic measurement electronics for multi-axis heterodyne interferometry with subnanometer precision

Year: 2025

Type: article

Source: Optical Engineering

DOI: 10.1117/1.oe.64.5.054113

Authors: Xu Xing, Yunke Sun, Xiaotong Yan, Yifei Xie, Pengcheng Hu

Institution: Harbin Institute of Technology

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410814990

FWCI: 0.301

Cites:

Cited by: 1

Related to: 10