Work

The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range

Year: 2025

Type: article

Abstract: Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a simple structure, which uses magnets to provide stable normal force and friction. Sliders and rails were used to provide long travel ranges of 80 mm and 70 mm in the X and Y directions, respectively. Compact optical encoders were installed on the platform to enhance the positioning accuracy. With a three-phase positioning strategy involving both stepping and closed-loop methods, the system achieved a positioning accuracy of 3 µm (0.03%) and a repeatability of 325 nm (0.0033%) over a 10 mm long travel range. The positioning resolution was 4.7 nm, which was primarily limited by optical encoder noise under the closed-loop control mode. An astigmatic optical profilometer was used for the wide-range and high-resolution surface imaging of the XY positioning platform.

Source: Actuators

DOI: 10.3390/act14060265

Authors: Zheng-Rong Guo, Hong-Sheng Tan, Chin-Shun Chang, Ing-Shouh Hwang, En-Te Hwu, Hsien-Shun Liao

Institutions: National Taiwan University, Institute of Physics, Academia Sinica, Technical University of Denmark

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,896

Funders: National Science and Technology Council, National Science and Technology Council