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Advancing Semiconductor Fabrication: A CNN-Based Wafer Defect Detection with XAI Insights

Year: 2025

Type: conference-paper

Source: International Conference on Electrical, Computer and Communication Engineering

DOI: 10.1109/ecce64574.2025.11013292

Authors: Md Rifat Hossen, Md Nahian Abdullah

Institution: Chittagong University of Engineering & Technology

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410855044

FWCI:

Cites: 10

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Related to: 10