High-fidelity recording periodic subwavelength 2D structures on silicon surface by femtosecond laser
Year: 2025
Type: article
Abstract: The application of femtosecond laser-induced periodic surface structures (LIPSSs) is often hindered by unsatisfactory uniformity and homogeneous morphology. In this study, a high-fidelity recording technique is introduced for imprinting diverse two-dimensional (2D) LIPSSs on silicon surfaces via the two-step femtosecond laser exposure and chemical etching. This technique achieves the precise recording of gratings, serving as pre-LIPSSs, effectively avoiding the negative impacts of ablation debris and hydrodynamic instability. Furthermore, by repetitive laser exposure and polarization adjustment, the competition between localized field enhancement and overlapping effect enables the controllable imprinting of deepening gratings and various 2D LIPSSs. This technique significantly enhances the precision and flexibility of femtosecond laser micro/nano-processing.
Source: Optics Express
DOI: 10.1364/oe.563975
Authors: Xiuyun Li, Ruiyan Li, Zhi Yu, Yang Jianjun
Institutions: Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, Qingdao Institute of Bioenergy and Bioprocess Technology, University of Chinese Academy of Sciences, Wenzhou University, Zhejiang Provincial Innovation Center of Laser Intelligent Equipment Technology, Institute of Metal Research
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
Awards: G2853612841, G410183829
OpenAlex ID: W4410888982