Design, analysis and fabrication of a novel high-sensitivity, low-voltage MEMS microphone using an integrated arm diaphragm
Year: 2025
Type: article
Source: Sensor Review
Institution: Babol Noshirvani University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410905186