Work

Effect of High Temperature Furnace Anneal to Element Diffusion in SIO2-SI3N4 Stacks

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017904

Authors: Huimin Ren, Libin Jia, Chaoyang Guan, Changda Li, Dingting Han, Weiran Li, Hongbo Sun, Guilei Wang, Chao Zhao

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410986475

FWCI:

Cites: 14

Cited by:

Related to: 10