Work

A Wafer Temperature Control System for Advanced Technology Node Manufacturing

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017909

Authors: Xiao Wei, Hongfeng Wan, Sisheng Cao, Liangsheng Li, Erhu Zheng, Yuping Ren

Institution: Advanced Micro-Fabrication Equipment (China)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4410986927

FWCI:

Cites: 4

Cited by:

Related to: 10