Work

Gapfill Improvement with Helium /Argon Sputter Gas of HDP FSG in Power Device

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017960

Authors: Zibo Xue, Zhengning Gao, Xiyuan Zhang, Junxian Gao, Tong Lei, YuShan Chi

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410986931

FWCI:

Cites: 3

Cited by:

Related to: 10