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Wafer Position Recognition Technology on Electrostatic Chucks

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017778

Authors: Jie Ling, Yu Yao, Dongmei Zhai, Songran Zhu, Changxin Xing

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410986993

FWCI:

Cites: 3

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Related to: 10