Enhancing Process Stability of AIN Thin Films through Pre-Deposition in Chamber and Optical Emission Spectroscopy Assisted by Big Data Analysis
Year: 2025
Type: conference-paper
Institutions: National Central University, Delta Electronics (Taiwan)
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Delta
OpenAlex ID: W4410987126