Study of the Influence of Surface Cleaning Process on SiGe Epitaxy Particle Defects
Year: 2025
Type: conference-paper
Authors: Xuan Liu, CunZhe He, DongLiang Gao, YiMao Cai
Institution: Peking University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410987204