Work

Retaining Ring Wear Study with Ceria Slurry in Chemical Mechanical Planarization

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11018047

Authors: Guangyi Wang, Xinxin Li, Jialiang Huang, Yanan Wu, Huiwen Wang, Shoutian Li

Institution: East China University of Science and Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

OpenAlex ID: W4410987206

FWCI:

Cites: 1

Cited by:

Related to: 10