A Diffusion-Based Approach to Wafer Defect Image Generation in Semiconductor Manufacturing
Year: 2025
Type: conference-paper
Authors: Xiaotian Qiu, Yumeng Liu, Qian Jin, Yining Chen, Cheng Zhuo, Qi Sun
Institution: Zhejiang University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410987221