Etching Surface and Etching Dimension Control for IGZO TFT Fabrication in 3D Memory Device
Year: 2025
Type: conference-paper
Authors: Zehuan Hei, Yang Xu, Yang Liu, Zhonghua Jin, Tuo Xin, Xiaodong Li, Ganlin Song, Jiao Jin, Wenjun Chen, Chaoyang Guan, Jian Li, Ming Zeng, Baodong Han, Hongbo Sun, Guilei Wang, Chao Zhao
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410987226