Work

A Model Using Plasma Enhanced Vapor Chemical Deposition of Silicon Nitride Side Walls

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017968

Authors: Zhihao Li, Dong Ni

Institution: Zhejiang University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410987236

FWCI:

Cites: 7

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Related to: 10