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Cleaning and Assessing Particles from Polymer Materials Used in Semiconductor Manufacutring Tool

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11018004

Authors: Ling Wang, Yimeng Xu, Bingjie Zou, Kaixuan Chen

Language: English

Topic: Ultrasound and Cavitation Phenomena

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410987241

FWCI:

Cites: 1

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Related to: 10