Work

Correction Model for Plate Mapping Error Based on Acceleration and Deceleration of Plate Stage

Year: 2025

Type: erratum

DOI: 10.1109/cstic64481.2025.11017986

Authors: Yuzhi Li, Zhanzhan Chu, Yuebin Zhu, Chang Zhou, Wenbin Dai

Institutions: Shanghai Jiao Tong University, Shanghai Micro Electronics Equipment (China)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W4410987293

Cites: 3

Cited by:

Related to: 10