Dry Etching of Reduced Thermal Budget Borophosphosilicate Glass (BPSG) Using Furnace Anneal the Effect of Phosphorus and Boron Concentration
Year: 2025
Type: conference-paper
Authors: Dingting Han, Libin Jia, Sun Jiahui, Jin Jiao, Zhang Xin, Li Weiran, Li Changda, Ren Huimin, Hongbo Sun, Chao Zhao
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410987294