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Performance Improvement of Monolithic CFET by Backside Enhanced Contact with C-type Source/Drain Contact Technology

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017829

Authors: Jie Xu, Lei Cao, Yuzhe Yu, Qingkun Li, Hang Zhang, Lianlian Li, Kun Luo, Qingzhu Zhang, Zhenhua Wu, Huaxiang Yin

Institution: Chinese Academy of Sciences

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: National Natural Science Foundation of China, Chinese Academy of Sciences

OpenAlex ID: W4410987331

FWCI: 2.3

Cites: 3

Cited by: 1

Related to: 10