Work

A Design Stucture of Three Axis MEMS Accelerometer with Low Cross-Axis Sensitivity

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017831

Authors: Qing Xie, Zhongshan Xu, GuoDong Zhao, Rongzheng Ding, Yage Zhao, Xiaona Zhu, Shaofeng Yu

Institution: Fudan University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410987340

FWCI:

Cites: 7

Cited by:

Related to: 10