The Influence of Mandrel Materials in Self-Aligned Multiple Patterning Process
Year: 2025
Type: conference-paper
Authors: Jun Luo, Chunyu You, Guo Li, Wantong Li, Haiyun Zhu, Yongjian Luo, Zhongwei Jiang
Institution: NAURA (China)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410987373