Work

Use Damascus CMP to fabricate IGZO transistor in advanced Dram technology

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017800

Authors: Zeng Ming, Wang Wei, Sun Hongbo, Wang Guilei, Zhao Chao

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410987392

FWCI:

Cites: 6

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Related to: 10