Work

Abnormal EPI Pattern Failure Mode Analysis with Virtual Farbication

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017775

Authors: Brady Lee, Alex Wu, Jerry Chang, Ivan Wang

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410987494

FWCI:

Cites: 3

Cited by:

Related to: 10