Work

The Optimization of Metasurface lenses Fabrication based on Silicon Pillars within the fab's 12-inch production line

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017946

Authors: Wu Yongyu, Fang Xuankai, Du Xianchang, Shi Xiaoming, Fang Wenzhang, Jiang Huiyun

Institution: Zhejiang University

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4410987616

FWCI:

Cites: 9

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Related to: 10