Exploration of Boundary Conditions for Capacitor Etching Methods Under the Background of Characteristic Process
Year: 2025
Type: conference-paper
Authors: Yuxin Wang, Zhi Yao, Jan Wang, Jia Ding, Yanyan Zhao, Zekai Song, Zhiqiang Wei, Huaifu Li, Ce Zhou
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4410987698