Work

Study on the enhancement of surface quality of polyimide films by chemical mechanical polishing

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11018001

Authors: Yafei Yin, Baoguo Zhang, Wenhao Xian, Shitong Liu, Sihui Qin

Institution: Hebei University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4410987807

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Cites: 3

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Related to: 10