Work

ALE Like Post-ETCH SiC Surface Treatment

Year: 2025

Type: conference-paper

DOI: 10.1109/cstic64481.2025.11017981

Authors: Yongkang Cao, Jian Liu, Guo Chunxiang, Zoe Wang, Shiwei Zhuang, Kaidong Xu

Institution: Jiangsu Normal University

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

Funder: Ministry of Science and Technology

OpenAlex ID: W4410987902

FWCI:

Cites: 8

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Related to: 10